Title:
【発明の名称】リニアカソード
Document Type and Number:
Japanese Patent JP3015572
Kind Code:
B2
Abstract:
PURPOSE:To prevent a cathode from thermal deformation and secure the linearity despite repetitive heating and cooling by inserting an electron emitting material to the cathode body in such a way as movable in the longitudinal direction. CONSTITUTION:A linear cathode 1 is installed behind an anode 9 and grid 8, while a cathode heating filament 7 is installed behind the cathode 1. An electron emitting material 3 having a low work function is inserted into the center of the cathode 1, and heating is made by the filament 7 by means of thermal conduction, radiation, and electron bombardment until a requisite emission current density is obtained only with the material 3. Electron beam 12 is converged on a target 13 in a crusible 14 to make irradiation, and the target 13 is evaporated to produce a metal vapor 16. The material 3 and body 4 are movable left and right, and thermal deformation resulting from the difference in their thermal expansion is admitted. Therein a pin 5 is driven in the center of the material 3 and body 4, and the material 3 never slipe off from the body 4.
Inventors:
Ikuo Wakamoto
Hiroji Kobatake
Takamasa Nakamura
Shigeo Konno
Toru Takashima
Hiroji Kobatake
Takamasa Nakamura
Shigeo Konno
Toru Takashima
Application Number:
JP1289092A
Publication Date:
March 06, 2000
Filing Date:
January 28, 1992
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
JEOL Ltd.
JEOL Ltd.
International Classes:
H01J37/06; H01J37/065; H01J37/30; H05B7/00; (IPC1-7): H01J37/06; H01J37/065
Domestic Patent References:
| JP5205676A |
Attorney, Agent or Firm:
Toshiro Mitsuishi (1 person outside)