Title:
【発明の名称】ダイヤモンド多層薄膜
Document Type and Number:
Japanese Patent JP2603257
Kind Code:
B2
Inventors:
Koji Kobashi
Nishimura Kozo
Hiroi Hirai
Takeo Kawate
Nishimura Kozo
Hiroi Hirai
Takeo Kawate
Application Number:
JP14207687A
Publication Date:
April 23, 1997
Filing Date:
June 05, 1987
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
C01B31/06; C23C16/26; C23C16/27; C23C16/50; C23C16/511; C30B29/04; (IPC1-7): C30B29/04; C01B31/06; C23C16/26
Domestic Patent References:
| JP61106494A |
Attorney, Agent or Firm:
Ueki Kuichi