PURPOSE: To provide a micro XYθ stage capable of exactly setting an object part for observation of a sample to be measured in an arbitrary direction under a microscope and starting a measurement operation by scanning the sample as it is with SPM.

CONSTITUTION: This micro XYθ stage has a base member 1, plural actuators 21, 22, 23 projectingly disposed on this base member 1 and a sample stand 3 placed on these actuators 21, 22, 23. The outside surface of the respective actuators 21, 22, 23 are provided with quadrisected outer electrodes N, E, W, S, and a voltage is applied to an inner electrode G disposed within the actuators 21, 22, 23, thereby bending deformation is biaxially generated in the actuators 21, 22, 23 and the heights from the base 1 of the actuators 21, 22, 23 are made coincident with each other. The actuators 21, 22, 23 are arranged on the base member 1 so as to exist at the approximate vertexes of the regular triangle to constitute the stage.