Title:
【発明の名称】クリーンルーム用のエアフィルタ
Document Type and Number:
Japanese Patent JP3061135
Kind Code:
B1
Inventors:
Ryusuke Gotoda
Koji Kato
Minoru Takahashi
Koji Watanabe
Koji Kato
Minoru Takahashi
Koji Watanabe
Application Number:
JP17409499A
Publication Date:
July 10, 2000
Filing Date:
June 21, 1999
Export Citation:
Assignee:
Hitachi Plant Construction Co., Ltd.
International Classes:
B01D46/52; (IPC1-7): B01D46/52
Domestic Patent References:
| JP2229509A | ||||
| JP63200814A |
Attorney, Agent or Firm:
Kenzo Matsuura