PURPOSE: To provide the process model evaluating device which can select flexibly a model and a model parameter of the highest evaluation in accordance with the state of a process to be applied, from plural process models and plural model parameters.
CONSTITUTION: A process model part 1 calculates a process predicted value obtained by predicting a process behavior after a prescribed time by a process measured value. An evaluation reference calculating part 2 fetches the process predicted value from the process model part 1, a measured process output value, and model evaluation function data 7, and calculates plural evaluation amounts, based on plural evaluation references. A model evaluating part 3 fetches mapping function data 8 and weight coefficient data 9 for setting a condition for normalizing the evaluation amount in accordance with plural evaluation amounts and a state of a process to be applied, and converts plural evaluation quantities to a one-dimensional evaluation quantily in accordance with the state of the process to be applied.
TADOKORO HIDEYUKI
YODA MIKIO
KURISU HIROMITSU
