Title:
FLOW CONTROLLER
Document Type and Number:
Japanese Patent JP3027802
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To make influence received from flow rate change generated in another line as small as possible and to miniaturize an equipment for carrying fluid by installing a flow meter and a control valve in respective fluid carrying lines and providing a control means for centralizedly controlling the operation of the control valves based on signals from the respective flow meters.
SOLUTION: The control means 3 controls the open degree of the control valves 1a and 1b and adjusts the flow rate of the fluid flowing through first and second lines. That is, the signals measured in the flow meters 2a and 2b are sent through an A/D converter 4 and an I/O controller 6 to a CPU 7 as digital flow rate signals. Then, the CPU 7 computes a difference to the flow rate set beforehand (pattern set by a program) and sends it through the I/O controller 6 and a D/A converter 5 to the control valves 1a and 1b as difference signals. Then, the control valves 1a and 1b are operated so as to turn the difference signals to zero and adjustment is performed so as to be the set flow rate.
Inventors:
Atsuyuki Sakai
Application Number:
JP3866697A
Publication Date:
April 04, 2000
Filing Date:
February 24, 1997
Export Citation:
Assignee:
CKD Corporation
International Classes:
G05D7/06; (IPC1-7): G05D7/06
Domestic Patent References:
| JP6102940A | ||||
| JP588755A | ||||
| JP6180611A | ||||
| JP7319551A | ||||
| JP60148615U |
Attorney, Agent or Firm:
Takashi Tomizawa (2 outside)