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Title:
PRODUCTION OF ITO SINTERED COMPACT
Document Type and Number:
Japanese Patent JPH0624827
Kind Code:
A
Abstract:

PURPOSE: To provide a method for inexpensively obtaining an ITO sintered compact having ≥85% relative density and ensuring a proper rate of film formation and low frequency of abnormal discharge by sintering at ≤1,550°C at which the coarsening of a structure is avoided and shrinkage is hardly caused without using an expensive hot press.

CONSTITUTION: Non-heat-treated powder having ≤1μm average particle diameter and contg. indium oxide or indium oxide and tin oxide in a desired ratio is mixed with 5-50wt.% heat-treated powder obtd. by heat-treating powder having ≤1μm average particle diameter and contg. indium oxide and tin oxide in a desired ratio at 800-1,600°C and the resulting mixture is compacted and sintered.


Inventors:
KISHI TOSHITO
TAKANASHI SHOJI
NATE TATSUO
KASE HIROMITSU
ISHIKAWA TOSHIHARU
TOBARI KENJI
Application Number:
JP20025292A
Publication Date:
February 01, 1994
Filing Date:
July 03, 1992
Export Citation:
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Assignee:
SUMITOMO METAL MINING CO
SHONAN DENSHI ZAIRYO KENKYUSHO
International Classes:
C04B35/00; C04B35/457; C04B35/495; C23C14/34; (IPC1-7): C04B35/00; C23C14/34
Attorney, Agent or Firm:
Katsunari Nakamura (1 person outside)