Title:
EVACUATION TREATING DEVICE
Document Type and Number:
Japanese Patent JP3037173
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enable high throughput while the generation of dusts is prevented by measuring the number of suspending dusts in a sealed chamber, calculating the exhausting speed and sucking speed from the detected number of suspending dusts and controlling the exhausting speed and sucking speed.
SOLUTION: A gas in a sealed chamber 1 is exhausted by a pump 4 via an exhaust pipe 2 and a throttle valve 3. A gas is fed to the sealed chamber 1 in an evacuated state from a suction pipe 6 via a flow rate control valve 5. A dust counter 7 always monitors the condition of dusts to be generated in the sealed chamber 1. The detected number of the suspending dusts is fed to a control unit 8, and this control unit 8 controls and adjusts the opening degree of the throttle valve 3 or the flow rate control valve 5 in accordance with the detected number of the suspending dusts. In the case the detected number of the suspending dusts is less than certain value, the throttle valve 3 is continued to be adjusted in the opening direction, so that the exhausting speed is made high in the condition in which the generation of dusts is hard to occur.
Inventors:
River Saki Yasuo
Application Number:
JP1107997A
Publication Date:
April 24, 2000
Filing Date:
January 24, 1997
Export Citation:
Assignee:
Yamaguchi NEC Corporation
International Classes:
C23C16/44; C23C16/455; C23C16/52; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): C23C16/455; C23C16/52; H01L21/205; H01L21/3065
Domestic Patent References:
| JP6299470A | ||||
| JP4284622A | ||||
| JP493017A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)
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