Title:
INSPECTION METHOD FOR IMAGE PATTERN AND ITS DEVICE
Document Type and Number:
Japanese Patent JP2594000
Kind Code:
B2
Abstract:
PURPOSE: To suppress the misjudgement and prevent overlooking of the defects by extending by the specified amount the master data in a corrective space where the location of the evaluation space is shifted in the extended space and making a comparison with the object data.
CONSTITUTION: An A/D converting part 2 converts the analog signal from a reading part 1 and outputs, to a binarization processing part 3 to generate the object data OS, and transfers them to a comparison-inspection part 6. When a printed substrate 7 is a good product, the object data are sent to an extended processing part 4 as the master data MS. The extended processing part 4 achieves the extended processing to obtain the extended master data EMS. Then, the extended space is obtained around the evaluation space, and a plurality of corrective spaces are set therein. The evaluation object data OD are obtained from the object data OS corresponding to the evaluation space, and the corrective evaluation master data MDi are obtained from the data EMS corresponding to the corrective space. And, a non-matching part between the data MDi and the data OD is inspected by a picture element operator of an operator judging part 64.
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Inventors:
North Gate Ryuji
Application Number:
JP14006392A
Publication Date:
March 26, 1997
Filing Date:
April 30, 1992
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G01B11/24; G01N21/88; G01N21/93; G01N21/956; G06T1/00; G06T7/00; (IPC1-7): G01N21/88; G01B11/24; G06T7/00
Domestic Patent References:
| JP361839A | ||||
| JP62245388A |
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)