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Title:
EL END SURFACE LIGHT EMITTING ELEMENT
Document Type and Number:
Japanese Patent JPH0645064
Kind Code:
A
Abstract:

PURPOSE: To prevent the damage at dry etching on manufacturing process and improve reliability by using specified materials for an electrode layer and a dielectric layer.

CONSTITUTION: A lower electrode layer 2 consisting of Ta is formed on a glass base 1 by means of sputtering. Ta2O5 is sputtered thereon to form a lower dielectric layer 3 and an upper dielectric layer 5. The dielectric layer 5 is formed on an EL light emitting layer 4 in which ZnS:Mn is formed on the dielectric layer 3 by means of EB evaporation. Then, Ta is formed thereon by means of sputtering to form an upper electrode layer 6. The resulting continuously accumulated material is etched into a determined form by photolithography to form an EL end surface light emitting element having a plurality of pixels. Thus, the generation threshold of element can be reduced to near the half in a conventional product to reduce drive applying voltage about 1/2 of the conventional, and a material excellent also in reliability can be provided.


Inventors:
UNO SHIGEKI
Application Number:
JP19838392A
Publication Date:
February 18, 1994
Filing Date:
July 24, 1992
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
B41J2/44; B41J2/45; B41J2/455; H04N1/036; H05B33/00; H05B33/12; H05B33/22; H05B33/26; (IPC1-7): H05B33/00; B41J2/44; B41J2/45; B41J2/455; H04N1/036; H05B33/22; H05B33/26
Attorney, Agent or Firm:
Suyama Saichi