PURPOSE: To obtain a manufacturing method of a chalcopyrite type compound having no slippage of composition and no non-uniformity in composition by a method wherein group I-III oxides containing a group Ib element and a group IIIb element are subjected to heating treatment in a reducing atmosphere containing a group VIb element or an atmosphere containing a reducing group VIb compound.
CONSTITUTION: A thin film 2 of molybdenum or the like is formed on a substrate I constituted of glass or the like. A thin film 3 of group I-III oxides is formed on the film 2. Next, a substrate thus prepared is subjected to heating treatment in a reducing atmosphere containing a group VIb element or an atmosphere containing a reducing group VIb compound and thereby the thin film 3 is transformed into a thin film 4 of a chalcopyrite type compound. According to this constitution, a manufacturing method of the chalcopyrite type compound having no slippage of composition and, in addition, no nonuniformity in microscopic composition can be obtained.
NISHITANI MIKIHIKO
NEGAMI TAKAYUKI
