PURPOSE: To obtain a flexible device capable of executing light input/output together with another optical device or the like by providing the device with a plane mirror and a plane convex lens integated on the surface of a substrate on the opposite side of an waveguide.
CONSTITUTION: An waveguide 2 is formed on a substrate (e.g. an InP) 1 and a V-shaped groove 12 is etched on the surface of the device. The side face of the groove 12 restricts the waveguide 2, a mirror 3 inclined only by 45° in the longitudinal direction is formed on the end part of the waveguide 2 and a lens 4 is formed on the surface 18 of the substrate 1 on the opposite side of the waveguide 2 as a constitutional part of the substrate 1. The lens 4 is formed by a convex surface on the outer surface of the substrate 1 and by a supposed plane boundary 16 on the inside of the substrate 1. The lens 4 is worked by a dry etching method. The surface, i.e., the convex surface 15, of the lens 4 can be coated with a dielectric layer (e.g. Al2O3, SiO2).
| JPWO2017030207 | Optical device |
| JP2017003868 | OPTICAL DEFLECTOR |
| WO/2015/091282 | IMPROVEMENTS IN AND RELATING TO WAVEGUIDES |
GERUHARUTO FURANTSU
YOTSUHIEN HAINEN
