【発明の名称】半導体ウエハー用サセプターおよび半導体ウエハーの温度測定方法

Title:

【発明の名称】半導体ウエハー用サセプターおよび半導体ウエハーの温度測定方法

Document Type and Number:

Japanese Patent JP3091804

Kind Code:

B2

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Inventors:

Ryusuke Ushigoe
▲昇▼ 和宏
Shoichi Umemoto

Application Number:

JP5584393A

Publication Date:

September 25, 2000

Filing Date:

March 16, 1993

Export Citation:

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Assignee:

Nippon Insulator Co., Ltd.

International Classes:

H01L21/324; H01L21/22; H01L21/68; H01L21/683; H05B3/14; H05B3/18; (IPC1-7): H01L21/68; H01L21/22; H01L21/324; H05B3/14; H05B3/18

Domestic Patent References:

JP2215135A
JP362920A
JP3261131A
JP487178A
JP4299832A
JP1152639A

Attorney, Agent or Firm:

Akihide Sugimura (9 outside)

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