Title:
【発明の名称】縦型減圧気相成長装置
Document Type and Number:
Japanese Patent JP3072664
Kind Code:
B2
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Inventors:
Takashi Ogawa
Application Number:
JP31389691A
Publication Date:
July 31, 2000
Filing Date:
October 31, 1991
Export Citation:
Assignee:
NEC
International Classes:
B01J3/00; B01J3/02; H01L21/205; (IPC1-7): H01L21/205
Domestic Patent References:
| JP295235U |
Attorney, Agent or Firm:
Tadao Hirata (2 outside)