Title:
COATING APPARATUS AND FILM FORMING APPARATUS HAVING COATING APPARATUS INCORPORATED THEREIN
Document Type and Number:
Japanese Patent JP2575995
Kind Code:
B2
Abstract:
PURPOSE: To efficiently replace a coating solution by dispensing with the washing of a nozzle at the time of the replacement of the coating solution.
CONSTITUTION: In a coating solution supply apparatus 20, a coating solution tank 23 and a waste solution tank 24 are provided in a box 22 and the coating solution in the coating solution tank 23 is sent to an air vent tank 28 and the base part of a nozzle unit 33 is attached to the upper surface of the box 22 in a freely detachable manner by rivets 32. The nozzle unit 33 is constituted so that a nozzle 35 is provided to the leading end of a hollow arm 34 and the coating solution tube 36 led out of the air vent tank 28 is passed through the hollow arm 34 to be connected to the nozzle 35. Further, the receiver 37 in which the nozzle 35 fits in such a state that the nozzle unit 33 is attached to the coating solution supply apparatus 20 by the rivets 32 is provided to the upper surface of the box 22 and connected to the waste solution tank 24 by piping 38.
Inventors:
KUMAZAWA HIROTSUGU
KOBAYASHI KATSURO
SAGO HIROHITO
KOBAYASHI KATSURO
SAGO HIROHITO
Application Number:
JP13612492A
Publication Date:
January 29, 1997
Filing Date:
April 28, 1992
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
B05C5/00; B05C11/08; B05C11/10; (IPC1-7): B05C11/08; B05C5/00; B05C11/10
Attorney, Agent or Firm:
Tomiho Inamoto (3 outside)