Title:
【発明の名称】SiC質ウェーハ積載ボート
Document Type and Number:
Japanese Patent JP2553932
Kind Code:
B2
Inventors:
NOZAWA TATSUO
SATO SHUNKICHI
MEGURO KAZUNORI
SATO SHUNKICHI
MEGURO KAZUNORI
Application Number:
JP15948589A
Publication Date:
November 13, 1996
Filing Date:
June 23, 1989
Export Citation:
Assignee:
TOSHIBA CERAMICS CO
International Classes:
H01L21/22; H01L21/31; (IPC1-7): H01L21/22; H01L21/31
Attorney, Agent or Firm:
Yoshiyuki Matsuyama