【発明の名称】MES型半導体装置の製造方法

Title:

【発明の名称】MES型半導体装置の製造方法

Document Type and Number:

Japanese Patent JP2515572

Kind Code:

B2

Inventors:

KIKUCHI KENICHI
NAKAGAWA YOSHIKAZU

Application Number:

JP6168488A

Publication Date:

July 10, 1996

Filing Date:

March 14, 1988

Export Citation:

Assignee:

ROHM KK

International Classes:

H01L21/28; H01L21/205; H01L21/338; H01L29/80; H01L29/812; (IPC1-7): H01L21/338; H01L29/812

Domestic Patent References:

Attorney, Agent or Firm:

Abe Ituro

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