Title:
【考案の名称】研磨装置
Document Type and Number:
Japanese Patent JP2595237
Kind Code:
Y2
Inventors:
Toshihiro Noda
Application Number:
JP5455293U
Publication Date:
May 24, 1999
Filing Date:
October 07, 1993
Export Citation:
Assignee:
Ryobi Co., Ltd.
International Classes:
B24B47/20; B23Q15/00; B24B3/36; B24B49/10; (IPC1-7): B24B47/20; B23Q15/00; B24B3/36; B24B49/10
Domestic Patent References:
| JP61146459A | ||||
| JP60249571A | ||||
| JP58191437A | ||||
| JP5558971A |
Attorney, Agent or Firm:
Furuya Eiko (2 outside)