Title:
【発明の名称】静電容量のトリミング方法
Document Type and Number:
Japanese Patent JP3068169
Kind Code:
B2
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Inventors:
Shogo Matsubara
Kenichi Ishii
Kenichi Ishii
Application Number:
JP26900090A
Publication Date:
July 24, 2000
Filing Date:
October 05, 1990
Export Citation:
Assignee:
NEC
Tama Electric Industry Co., Ltd.
Tama Electric Industry Co., Ltd.
International Classes:
H01G4/012; H01G4/255; H01L21/822; H01L27/01; H01L27/04; H01S3/00; (IPC1-7): H01G4/255; H01G4/012; H01L21/822; H01L27/01; H01L27/04
Domestic Patent References:
JP56120123A | ||||
JP2205683A | ||||
JP2165883A |
Attorney, Agent or Firm:
Masaru Watanabe (4 outside)