Title:
【発明の名称】真空装置
Document Type and Number:
Japanese Patent JP3030458
Kind Code:
B1
Inventors:
Masaki Hesaka
Matsuura
Fuki Kurisu
Matsuura
Fuki Kurisu
Application Number:
JP13913499A
Publication Date:
April 10, 2000
Filing Date:
May 19, 1999
Export Citation:
Assignee:
Shinko Sangyo Co., Ltd.
International Classes:
H01L21/203; B01J3/00; (IPC1-7): B01J3/00; H01L21/203
Domestic Patent References:
| JP3237085A | ||||
| JP8100232A | ||||
| JP3122031A |
Attorney, Agent or Firm:
Fujio Nakamae