Title:
PROBE CARD
Document Type and Number:
Japanese Patent JPH0582601
Kind Code:
A
Abstract:
PURPOSE: To provide a probe card which has an insulator that fixes a plurality of probes and that permits the probes to be uniform.
CONSTITUTION: Probes 2 are fixed on a probe card board 1 by means of a first insulator 4 and the parts close to the tips of the probes are fixed by a second insulator 3. Thus, even when a probe card is used repeatedly, the uniformity of the heights of the tips of the probes 2 is attained by fixing the parts close to the tips of the probes 2 of the probe card by the insulator 3, and imperfect contact caused by contact pressure insufficiency and bonding pad breakage caused by excess contact pressure are prevented.
Inventors:
TAKAHASHI MASAYUKI
Application Number:
JP24227791A
Publication Date:
April 02, 1993
Filing Date:
September 24, 1991
Export Citation:
Assignee:
NEC YAMAGATA LTD
International Classes:
G01R31/26; H01L21/66; (IPC1-7): G01R31/26; H01L21/66
Attorney, Agent or Firm:
Uchihara Shin
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