Title:
【考案の名称】半導体装置
Document Type and Number:
Japanese Patent JPH0660158
Kind Code:
U
Inventors:
Kado Sadayuki
Shigeru Takami
Shigeru Takami
Application Number:
JP146393U
Publication Date:
August 19, 1994
Filing Date:
January 25, 1993
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS,LTD.
International Classes:
G01K7/01; G01K7/00; H01L37/00; (IPC1-7): H01L37/00; G01K7/00
Attorney, Agent or Firm:
Shigeji Sato (1 person outside)
Next Patent: COLOR CONVERSION PROCESSING UNIT