Title:
【発明の名称】基板の回転式処理装置
Document Type and Number:
Japanese Patent JP3054028
Kind Code:
B2
Inventors:
Yoshimitsu Fukutomi
Katsuji Yoshioka
Katsuji Yoshioka
Application Number:
JP11360594A
Publication Date:
June 19, 2000
Filing Date:
April 28, 1994
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G03F7/16; B05C11/08; H01L21/027; H01L21/304; (IPC1-7): H01L21/027; B05C11/08; G03F7/16; H01L21/304
Domestic Patent References:
| JP6120136A | ||||
| JP6120132A | ||||
| JP4118074A |