Title:
【発明の名称】エンコーダ及びこれを有するシステム
Document Type and Number:
Japanese Patent JP3066923
Kind Code:
B2
Abstract:
An encoder includes a light illuminating device, an optical scale and a photosensor, and detects information of relative displacement between the scale and the the illuminating light. A birefringent element, such as a Savart plate or the like, is disposed in the optical path between the light illuminating device and the photosensor to generate a plurality of images of the scale having different phases. A plurality of output signals having a phase difference are obtained using the images of the scale.
Inventors:
Masahiko Igaki
Prince Ishizuka
Masaru Chii
Prince Ishizuka
Masaru Chii
Application Number:
JP18866691A
Publication Date:
July 17, 2000
Filing Date:
July 29, 1991
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/00; G01D5/34; G01D5/38; G01D5/36; (IPC1-7): G01D5/38; G01B11/00; G01D5/36
Domestic Patent References:
| JP63277925A | ||||
| JP6381212A | ||||
| JP5826002B2 |
Attorney, Agent or Firm:
Keizo Nishiyama (2 outside)