Title:
【発明の名称】欠陥検査装置
Document Type and Number:
Japanese Patent JP2577655
Kind Code:
B2
Inventors:
IWASA MASAKAZU
SONE SHIRO
SONE SHIRO
Application Number:
JP26913890A
Publication Date:
February 05, 1997
Filing Date:
October 05, 1990
Export Citation:
Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
G01N21/88; G01N21/89; G01N21/892; (IPC1-7): G01N21/89
Attorney, Agent or Firm:
Fumio Yamada (1 person outside)