Title:
PHOTOSENSITIVE PASTE
Document Type and Number:
Japanese Patent JP3028718
Kind Code:
B2
Abstract:
PURPOSE: To provide a photosensitive paste containing a phosphor showing yellow body color as a powder material with which a pattern of high accuracy can be formed by photolithography.
CONSTITUTION: The photosensitive paste consists of a photosensitive vehicle containing dispersant, hardening agent, photopolymn. initiator, and photopolymn. accelerator, and a phosphor showing yellow body color. The photopolymn. initiator consists of 2,4-diethylthioxanthone (DETX) and 3,3,4,4-tetra-(tri- butylperoxycarbonyl)benzophenone (BTTB). Enough hardening reaction is obtd. compared to a conventional example when the obtd. paste is exposed to UV rays in a photolithographic process, and an accurate and precise pattern can be formed. This is because the photosensitive paste has higher sensitivity by addition of BTTB. During exposure, DETX and BTTB cause a redox reaction, and further, triethanolamine forms charge transfer complex with each of DETX and BTTB and then causes hydrogen drawing reaction.
Inventors:
Naomitsu Takahashi
Masao Saito
Masao Miyagijima
Masao Saito
Masao Miyagijima
Application Number:
JP30054093A
Publication Date:
April 04, 2000
Filing Date:
November 30, 1993
Export Citation:
Assignee:
Futaba Electronics Co., Ltd.
International Classes:
G03F7/004; G03F7/031; G03F7/038; H01J31/15; (IPC1-7): G03F7/031; G03F7/004; G03F7/038; H01J31/15
Domestic Patent References:
| JP6194040A | ||||
| JP237349A | ||||
| JP299585A | ||||
| JP6327830A |
Attorney, Agent or Firm:
Norimitsu Nishimura