Title:
【発明の名称】フォトマスクブランク
Document Type and Number:
Japanese Patent JP2556534
Kind Code:
B2
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Inventors:
MITSUI MASARU
MAEDA YOSHIO
USHIDA SHOJI
MAEDA YOSHIO
USHIDA SHOJI
Application Number:
JP30189787A
Publication Date:
November 20, 1996
Filing Date:
November 30, 1987
Export Citation:
Assignee:
HOYA CORP
International Classes:
G03F1/00; G03F1/50; G03F1/54; H01L21/027; H01L21/30; (IPC1-7): G03F1/08; H01L21/027
Domestic Patent References:
| JP6252550A | ||||
| JP62257166A | ||||
| JP63212937A | ||||
| JP63202748A | ||||
| JP63214754A | ||||
| JP63214755A |
Attorney, Agent or Firm:
Setsiya Aniya