Title:
【発明の名称】基板分割装置
Document Type and Number:
Japanese Patent JP2516025
Kind Code:
B2
Inventors:
SEKI TAKEO
TAKAHASHI KAZUYA
KOMATA HISASHI
TAKAHASHI KAZUYA
KOMATA HISASHI
Application Number:
JP19892887A
Publication Date:
July 10, 1996
Filing Date:
August 08, 1987
Export Citation:
Assignee:
NIPPON DENPA KOGYO KK
International Classes:
B26F3/00; B28D5/00; H05K3/00; (IPC1-7): B26F3/00; B28D5/00
Domestic Patent References:
| JP5750261Y2 |