【発明の名称】応力補償型シュード・モルフィック高電子移動度トランジスタ

Title:

【発明の名称】応力補償型シュード・モルフィック高電子移動度トランジスタ

Document Type and Number:

Japanese Patent JP3000489

Kind Code:

B2

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Inventors:

Masahiko Higuchi
Kenji Imanishi
Tomonori Ishikawa

Application Number:

JP8042691A

Publication Date:

January 17, 2000

Filing Date:

March 20, 1991

Export Citation:

Assignee:

富士通株式会社

International Classes:

H01L21/20; H01L21/203; H01L21/338; H01L29/778; H01L29/812; (IPC1-7): H01L29/778; H01L21/20; H01L21/203; H01L21/338; H01L29/812

Domestic Patent References:

JP2254731A
JP61289673A

Other References:

ＪｏｕｒｎａｌｏｆＶａｃｕｕｍＳｃｉｅｎｃｅ＆ＴｅｃｈｎｏｌｏｇｙＢ，Ｖｏｌ．８，Ｎｏ．２（Ｍａｒｃｈ／Ａｐｒｉｌ１９９０）ｐ．３６４−３６６

Attorney, Agent or Firm:

Shoji Kashiwaya (1 person outside)

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