Title:
FORMATION OF HARD INORGANIC THIN FILM
Document Type and Number:
Japanese Patent JPH0544011
Kind Code:
A
Abstract:
PURPOSE: To stably form a hard inorg. thin film having excellent wear resistance and high adhesive strength to the substrate.
CONSTITUTION: When a thin film 6 of the nitride, oxide or carbide of a metal as an inorg. compd. is formed on the surface 10 of a substrate 1, a second metallic element having a greater affinity for the nonmetallic element in the inorg. compd. than for the first metallic element in the inorg. compd. is implanted into the surface 10 of the substrate 1 and a coating film 4 of the inorg. compd. (e.g., CrN) is formed on the substrate 1 by PVD. The second metallic element is then thermally diffused into the coating film 4 to form a compd. with the nonmetallic element.
Inventors:
MORI KAZUHIKO
NAKAGAWA MASAHIRO
MARUMOTO IKURO
SHIMODA KENJI
YOSHIDA MAKOTO
NAKAGAWA MASAHIRO
MARUMOTO IKURO
SHIMODA KENJI
YOSHIDA MAKOTO
Application Number:
JP19793391A
Publication Date:
February 23, 1993
Filing Date:
August 07, 1991
Export Citation:
Assignee:
TOYOTA MOTOR CORP
International Classes:
C23C10/28; C23C14/02; C23C14/06; C23C14/14; C23C14/32; C23C14/48; C23C14/58; C23C28/00; (IPC1-7): C23C10/28; C23C14/02; C23C14/06; C23C14/14; C23C14/32; C23C14/48; C23C14/58; C23C28/00
Attorney, Agent or Firm:
Hiroshi Okawa
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