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Title:
PLANE GRINDING DEVICE WITH DRESSING MECHANISM AND METHOD THEREOF
Document Type and Number:
Japanese Patent JPH0615560
Kind Code:
A
Abstract:

PURPOSE: To dress a surface plate in a plane grinding device without taking out a carrier.

CONSTITUTION: An upper surface plate 4 is made to go up to the specified height. Next, when an inner gear support frame 2a is made to go up, an outer support ring 20 and a roller 28 cane into contact with an internal gear side end and a sun gear side end of a carrier 3, thereby uplifting this carrier 3. With this constitution, the carrier 3 goes up to the height where it separates from a lower surface plate 5 in keeping an engaged state between a sun gear 1 and an internal gear 2 intact. In succession, a brush existing in a standby position is turned round up to an interval between both these surface plates 4 and 5, having it held between these surface plates, and then it is made contact with their grinding surfaces. Next, with the sun gear 1 left stopped intact, both these surface plates 4, 5 and the brush are all rotated, thereby dressing each of the grinding surfaces of these surface plates 4 and 5 by the brush.


Inventors:
NAGAO KATSUNORI
Application Number:
JP17385592A
Publication Date:
January 25, 1994
Filing Date:
June 08, 1992
Export Citation:
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Assignee:
SPEEDFAM CO LTD
International Classes:
B24B37/08; B24B37/12; B24B53/017; (IPC1-7): B24B37/00; B24B37/04
Attorney, Agent or Firm:
Hiroshi Hayashi (2 outside)



 
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