Title:
【発明の名称】硬質炭素膜を用いたMIM素子の製造方法
Document Type and Number:
Japanese Patent JP2543913
Kind Code:
B2
Abstract:
PURPOSE:To widen the control range of the characteristics of a metal-insulating film-metal (MIM) element by using a hard carbon film as an insulating film and subjecting this film to a heat treatment. CONSTITUTION:The hard carbon film contg. at least either of an amorphous material and fine crystalline material contg. carbon atoms and hydrogen atoms as the main structure forming elements is used as the insulating film of the MIM element. The MIM element obtd. in such a manner is subjected to the heat treatment in this production process. The current-voltage characteristic of the MIM element has the relation expressed by the following equation when the hard carbon film is used as the insulating film: I=alphaVexp(betasq. rt. v), where alphais a proportional constant; beta is the coefft. to indicate nonlinearity. I increases sharply with an increase in V at beta>O. Namely, the resistance R drops sharply with an increase in V. The change of the resistance is sharper as beta is larger. alphais proportional to the area forming the MIM element and the thickness of the insulating film. The control in a wide range is thereby enabled.
Inventors:
Yuji Kimura
Eiichi Ota
Katsuhiko Tani
Eiichi Ota
Katsuhiko Tani
Application Number:
JP25854387A
Publication Date:
October 16, 1996
Filing Date:
October 13, 1987
Export Citation:
Assignee:
株式会社リコー
International Classes:
H01L49/00; G02F1/136; G02F1/1365; H01L49/02; (IPC1-7): G02F1/136; H01L49/02
Domestic Patent References:
| JP6262333A | ||||
| JP60241021A | ||||
| JP61241726A | ||||
| JP62174378A |
Attorney, Agent or Firm:
Morio Sada (1 outside)