Title:
【発明の名称】超純水の製造方法
Document Type and Number:
Japanese Patent JP3071870
Kind Code:
B2
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Inventors:
Atsushi Kitagawa
Application Number:
JP13834991A
Publication Date:
July 31, 2000
Filing Date:
May 13, 1991
Export Citation:
Assignee:
NITTO DENKO CORPORATION
International Classes:
B01D63/02; B01D65/00; C02F1/44; (IPC1-7): C02F1/44; B01D65/00
Domestic Patent References:
| JP22839A |
Attorney, Agent or Firm:
Mikatsu Matsuzuki