Title:
LIQUID SUPPLYING METHOD
Document Type and Number:
Japanese Patent JPH0650254
Kind Code:
A
Abstract:
PURPOSE: To reduce liquid supplying pressure, in relation to a liquid forcibly supplying method in which the diaphragm pump for chemical and the like is used.
CONSTITUTION: In a liquid supplying method for supplying liquid 5 under pressure into a use point 10 by means of a diaphragm pump 1, two diaphragm pumps 1 are provided in parallel, and reciprocating motion of the diaphragm 2 of the diaphragm pump 1 is shifted by 1/4 stroke to operate the diaphragm pump 1. And the liquid 5 is supplied under pressure into the use point 10.
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Inventors:
WADA SADAMITSU
Application Number:
JP20582092A
Publication Date:
February 22, 1994
Filing Date:
August 03, 1992
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
F04B13/00; F04B49/06; H01L21/306; (IPC1-7): F04B13/00; F04B49/06; H01L21/306
Attorney, Agent or Firm:
Teiichi
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