PURPOSE: To prevent a substrate from being broken although a prober can obtain a sufficient contact pressure with a pattern of the substrate and also perform smooth inspection even in continuous inspection.
CONSTITUTION: A substrate inspection instrument comprises a support member 10 fixed to a base frame, a first movable bracket 8 vertically movably supported on the support member 10, a second movable bracket 11 vertically movably supported on the first movable bracket 8 and a driving mechanism such as an air cylinder 12 attached to the first movable bracket 8 for vertically moving the second movable bracket 11. It further comprises a prober 9a attached to the second movable bracket 11 and a balance stay 10c for functioning weights 10d, 10e having an approximate weight as that of a load applied to the first movable bracket 8 to the first movable bracket 8.
TSUZUKI SATOSHI
SHIMIZU TSUNEHISA
