Title:
【発明の名称】プロ―ビング方法
Document Type and Number:
Japanese Patent JP2534851
Kind Code:
B2
Inventors:
ITOYAMA TAKETOSHI
Application Number:
JP26533586A
Publication Date:
September 18, 1996
Filing Date:
November 07, 1986
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/66; H01L21/67; H01L21/68; (IPC1-7): H01L21/68; H01L21/66
Domestic Patent References:
| JP59214234A | ||||
| JP5488776A |
Attorney, Agent or Firm:
Toshio Inoue