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Patent Searching and Data


Title:
SURFACE CONTAMINATION INSPECTING APPARATUS
Document Type and Number:
Japanese Patent JPH0627243
Kind Code:
A
Abstract:

PURPOSE: To enhance smear inspection speed by employing a plurality of smear arms for smearing a wide area simultaneously and transferring a specimen such that the waiting time for smear table is shortened.

CONSTITUTION: A plurality of specimens 2 are transferred sequentially on a transfer conveyor 1 onto a smear table 11. A smear control section 12 controls the smear table 11 and a plurality of smear arms 5 to rotate the specimen 2 and the arms 5 relatively thus smearing the specimen 2 by means of a filter paper 5a at the tip of the arm. A transfer control section 13 controls the conveyor 1 so that a smeared specimen 2 is transferred onto a measurement waiting table 14 and a next specimen 2 is transferred onto the smear table 11. On the other hand, a measurement control section 15 removes the filter paper 5a from each smear arm 5 and measures radiation dose while a contamination detector 7 checks contamination on the surface of the specimen 2. A transfer conveyor 8 is then controlled to transfer the specimen 2 from the waiting table 14 to other place depending on the check result.


Inventors:
TAKAHASHI MOTOMU
Application Number:
JP18241092A
Publication Date:
February 04, 1994
Filing Date:
July 09, 1992
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
G01T1/169; (IPC1-7): G01T1/169
Attorney, Agent or Firm:
Takehiko Suzue