Title:
【発明の名称】CMP研磨装置
Document Type and Number:
Japanese Patent JP3011156
Kind Code:
B2
Inventors:
Morimitsu Tanaka
Application Number:
JP29848997A
Publication Date:
February 21, 2000
Filing Date:
October 30, 1997
Export Citation:
Assignee:
NEC
International Classes:
B24B53/017; H01L21/304; (IPC1-7): B24B37/00
Domestic Patent References:
| JP9254018A | ||||
| JP5116069A | ||||
| JP9254017A | ||||
| JP6254761A | ||||
| JP6320413A | ||||
| JP63116261U |
Attorney, Agent or Firm:
Masanori Fujimaki