PURPOSE: To enable determination of a very small amount of sample, reduction of consumption of a reagent, miniaturization of an analyzer and reduction of preparing cost.

CONSTITUTION: The analyzer for determining a substance contained in a liquid from chemiluminescing amount utilizing an enzymatic reaction and chemiluminescing reaction is obtained by forming an enzymatic reaction part 3, a mixing part 4 and detection part 5 on one sheet of silicon substrate using an anisotropic etching. Consequently, dead space necessary for connecting each part can be made small and simultaneously total volume of the analyzer can be made small. Thereby, the very small amount of sample is not spread by the dead space and a consumption amount of reagent can be kept to several ten μl in one time measurement. Since light source is unnecessary, miniaturization of the analyzer is made possible and since many analyzers are collectively prepared, the preparing cost can also reduced.