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Patent Searching and Data


Title:
ELECTROFORMING DEVICE
Document Type and Number:
Japanese Patent JPH0641779
Kind Code:
A
Abstract:

PURPOSE: To reduce the fluctuation of the flow rate of an electroforming liquid and to facilitate the adjustment thereof by branching a part of the electroforming liquid flowing into electroforming tanks and joining it with the electroforming liquid flowing out of electroforming tanks via a piping having an flow rate regulating valve.

CONSTITUTION: The electroforming liquid carried from an electroforming liquid control tank 1 successively passes through filters 3-1, 3-2 by a pump 2 and then in branched and supplied to electroforming tanks 6-1, 6-2 through flow control valves 4-1, 4-2 and flowmeters 5-1, 5-2. The electroforming liquid flowing out thereof is circulated to the control tank 1 and the electroforming of a stamper for an optical disk, etc., is executed. In the electroforming device, a pipe 7 which branches a part of the electroforming liquid flowing into electroforming tanks 6-1, 6-2 and then joins it with the electroforming liquid flowing out of electroforming tanks 6-1, 6-2 is arranged and a flow control valve 4-3 and a flowmeter 5-3 are provided on the half-way of the pipe 7. In such a manner, the fluctuation of the flow rate of the electroforming liquid is reduced and can easily be regulated and the stamper, etc., having stable physical characteristics are obtained.


Inventors:
OGUMA TSUKASA
CHIBA KAZUYUKI
Application Number:
JP21966292A
Publication Date:
February 15, 1994
Filing Date:
July 28, 1992
Export Citation:
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Assignee:
TOSOH CORP
International Classes:
C25D1/00; G11B7/26; (IPC1-7): C25D1/00; C25D1/00; G11B7/26