PURPOSE: To uniformly polish the surface of an end surface of a substrate by way of restraining variation of the substrate by vertical motion of a polishing plate by fixing the substrate fixed on a substrate fixing plate in a guide groove provided on an installation jig inserted into a jig main body.

CONSTITUTION: By fastening an installation plate 4 on a substrate fixing plate 1 by a screw 5, a substrate 2 is sandwiched and fixed between both of the substrate fixing plate 1 and the installation plate 4 with a substrate presser plate 3. In this way, by holding the substrate fixing plate 1 with the substrate 2 fixed on it by a guide groove 7A provided on a fixed plate installation jig 7 and screwing a screw part 8B of a screw bar 8 screwed in a through hole 7C formed on the installation jig 7 in a screw hole 1C of the fixing plate 1, both of the substrate fixing plate 1 and the installation jig 7 are connected to each other and integrated. Thereafter, by setting the installation jig 7 on a polishing plate by way of passing it through a jig main body 10 provided with a polisher contact surface 10A and a groove 10B, polishing of the substrate 2 is carried out. At this time, by flowing in an brasive from the groove 10B provided on the contact surface 10A and by applying the abrasive on an end surface 2A, polishing is rationally carried out.