Title:
【発明の名称】プラズマ発生装置
Document Type and Number:
Japanese Patent JP2541393
Kind Code:
B2
Inventors:
NAKAHIGASHI TAKAHIRO
Application Number:
JP10459091A
Publication Date:
October 09, 1996
Filing Date:
April 10, 1991
Export Citation:
Assignee:
NISSIN ELECTRIC CO LTD
International Classes:
C23C16/50; C23C16/511; H01J27/18; H01J37/08; H01J37/305; H01L21/205; H01L21/302; H01L21/3065; H05H1/24; H05H1/46; (IPC1-7): H05H1/46; C23C16/50; H01J27/18; H01J37/08; H01L21/205; H01L21/3065; H05H1/24
Attorney, Agent or Firm:
Keiji Yamamoto