Title:
TACTILE SENSOR AND FINGERPRINT SENSOR USING THE SAME
Document Type and Number:
Japanese Patent JP3053007
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To detect fingerprints stably with high sensitivity by shaping a columnar elastic body larger in height than in breadth in section in a source, a drain direction.
SOLUTION: In order to measure an output of a tactile sensor transistor with the use of a source follower circuit, a differential output to an output of a source follower circuit of an adjacent MOSFET is measured which has a low output resistance and is little influenced by a characteristic change of a transistor because of a temperature change, thereby negating the influence of the temperature change. As a result, only a change because of unevenness of a fingerprint is taken out. A columnar elastic body 6 constituting a sensor part is formed of, e.g. photosensitive silicone resin in a rectangular cross section. For example, when a distance between a source area 1 and a drain area 4 is 5 μm, the cross section of the columnar elastic body 6 can be selected to have 7 μm breadth and 8 μm height. When a force is applied from above from a rising part of the fingerprint, the columnar elastic body 6 shrinks in a longitudinal direction and at the same time expands in a lateral direction. A deformation in the longitudinal direction can be facilitated, thereby improving sensitivity of a sensor.
Inventors:
Toshihide Kuriyama
Michihisa Suga
Michihisa Suga
Application Number:
JP20182797A
Publication Date:
June 19, 2000
Filing Date:
July 28, 1997
Export Citation:
Assignee:
NEC
International Classes:
G01B7/28; G01L5/00; G06K9/00; G06K19/10; G06T1/00; G01L1/18; H01L29/78; H01L29/84; (IPC1-7): G01L1/18; G01L5/00; G06T1/00; H01L29/84
Domestic Patent References:
JP61222179A | ||||
JP5180866A | ||||
JP10200129A | ||||
JP9126918A | ||||
JP868704A | ||||
JP6288846A | ||||
JP487376A | ||||
JP8162646A | ||||
JP61140182A | ||||
JP5383176A | ||||
JP9264799A | ||||
JP9181367A | ||||
JP9203671A | ||||
JP719975A | ||||
JP498468B1 |
Attorney, Agent or Firm:
Masaru Watanabe (3 outside)
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