Title:
【発明の名称】真空内処理方法及びその装置
Document Type and Number:
Japanese Patent JP2509813
Kind Code:
B2
Inventors:
NAKAYAMA IZUMI
SUZUKI AKITOSHI
NAWA HIROYUKI
KANEKO TOMOHIKO
SUZUKI AKITOSHI
NAWA HIROYUKI
KANEKO TOMOHIKO
Application Number:
JP26358386A
Publication Date:
June 26, 1996
Filing Date:
November 04, 1986
Export Citation:
Assignee:
ULVAC CORP
International Classes:
C23C16/44; C23C14/00; C23C16/50; C23F4/00; (IPC1-7): C23F4/00; C23C14/00; C23C16/44
Domestic Patent References:
| JP6011109B2 |
Attorney, Agent or Firm:
Yasuo Iisaka