ELECTRON BEAM EVAPORATING SOURCE - JAPAN STEEL WORKS LTD

Title:

ELECTRON BEAM EVAPORATING SOURCE

Document Type and Number:

Japanese Patent JPH059714

Kind Code:

A

Abstract:

PURPOSE: To prevent fracture of a hearth liner due to thermal shock used for an electron beam evaporating source.

CONSTITUTION: The vapor source 2 is contained in a plate-like hearth liner 9 disposed on the inside of a crucible 3. This hearth liner 9 consists of a material having high thermal insulation, and its outer diameter is made a little smaller than the inner diameter of the crucible 3. The hearth liner 9 is disposed on the bottom of the crucible 3 with a space 10 provided between the outer surface of the hearth liner 9 and the inner surface of the crucible 3. Or the surface of the hearth liner 9 facing the crucible 3 is made to have a porous layer.

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Inventors:

SHIBATA TAKASHI
TOKUSHIGE HIROYUKI
ENDO YASUO

Application Number:

JP18155891A

Publication Date:

January 19, 1993

Filing Date:

June 27, 1991

Export Citation:

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Assignee:

JAPAN STEEL WORKS LTD

International Classes:

C23C14/30; (IPC1-7): C23C14/30

Domestic Patent References:

JP63123667B
JPH0211156B2	1990-03-13
JP1151196B

Attorney, Agent or Firm:

Morishita Yasushi

Next Patent: ION BEAM VAPOR DEPOSITION DEVICE