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Patent Searching and Data


Title:
MICROSTRUCTURE FOR VIBRATING GYROSCOPE
Document Type and Number:
Japanese Patent JPH0712575
Kind Code:
A
Abstract:

PURPOSE: To provide an improved vibration gyroscope and its microstructure.

CONSTITUTION: A microstructure 50 for a vibration gyroscope 10 has a ring 14 supported in the state of being vibrated in the radial direction with a substantially undamped high Q value. The ring 14 is conductive and has a charge plate, and plural radially positioned charge conductive areas 13 are disposed in the periphery of the ring to sense the radial displacement of the ring. The ring 14, the support 15 and the charge conductive areas 13 are formed on the surface of a common silicon substrate 30 having a single integrated circuit in a mold.


Inventors:
MAIKERU UIRIAMU PUTSUTEI
DEEBUITSUDO SUTAAJI EDEI
Application Number:
JP9446994A
Publication Date:
January 17, 1995
Filing Date:
May 06, 1994
Export Citation:
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Assignee:
GEN MOTORS CORP
International Classes:
C23C14/14; B81B3/00; B81C1/00; G01C19/5684; (IPC1-7): G01C19/56; C23C14/14
Attorney, Agent or Firm:
Kyozo Yuasa (6 people outside)