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Title:
LASER APPARATUS AND METHOD FOR MEASURING STRESS IN THIN FILM BY USING A PLURALITY OF WAVELENGTHS
Document Type and Number:
Japanese Patent JPH063130
Kind Code:
A
Abstract:

PURPOSE: To avoid the measuring with fault reflecting angle due to interference by providing means for supplying a laser beam, means for directing the beam, and means for detecting the angle of the reflected beam.

CONSTITUTION: The beams B1, B2 of monochromatic lasers L1 and L2 of wavelengths λ1, λ2 disposed at perpendicular axes are coupled by an optical element P to form a laser beam B1, which is incident on a sample S. A reflected beam BR. is sensed by a photodetector to decide the reflecting angle at the incident point of the beam B3. To measure a plurality of points on the surface of the sample S, when any one of the sample S, element P, lasers L1, L2 is moved, it functions as a scanning laser reflecting stress measuring apparatus. On the other hand, when the beam B3 is divided into a plurality of beams by the element P so that the beam B3 is incident on the plurality of points on the surface of the sample S, it functions as a beam split laser reflecting stress measuring apparatus.


Inventors:
IRAN EI BURECHI
DOBU II HIRUSHIYU
Application Number:
JP20300691A
Publication Date:
January 11, 1994
Filing Date:
August 13, 1991
Export Citation:
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Assignee:
FUREKUSASU INC
International Classes:
G01B11/24; G01B11/16; G01L1/00; G01L1/24; (IPC1-7): G01B11/24; G01L1/00
Attorney, Agent or Firm:
Kazuo Kobashi (1 person outside)



 
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