Title:
OPTICAL INSPECTION DEVICE
Document Type and Number:
Japanese Patent JPH0545293
Kind Code:
A
Abstract:
PURPOSE: To remove noise effectively from the photo-receiving signal.
CONSTITUTION: A specimen 100 is irradiated with a laser beam laterally, and the light over a slit released upward is received by a TV camera 20. Therein the specimen 100 moves in the direction perpendicular to the laser beam. The released light over the slit obtained in association with this movement is added at each photo-receiving position, and noise component is determined. That is, noise at each photo-receiving position should remain without change even with moving specimen 100, and noise can be sensed from the adding result. Eventual noise is removed from the sensing results, and information associate with change in the specimen structure is obtained.
Inventors:
NANGOU NAGAFUMI
Application Number:
JP19004391A
Publication Date:
February 23, 1993
Filing Date:
July 30, 1991
Export Citation:
Assignee:
RATOTSUKU SYST ENG KK
International Classes:
G01N21/88; G01N21/956; H01L21/66; (IPC1-7): G01N21/88; H01L21/66
Domestic Patent References:
| JPS62119446A | 1987-05-30 | |||
| JPS54139285A | 1979-10-29 | |||
| JPS61283853A | 1986-12-13 |
Attorney, Agent or Firm:
Toshihiko Kanayama (2 outside)