Title:
【考案の名称】クリーンルーム用磁気シールド仕切構造体
Document Type and Number:
Japanese Patent JPH0756403
Kind Code:
Y2
Inventors:
Takashi Amaba
Koichiro Maekawa
Koichiro Maekawa
Application Number:
JP3874292U
Publication Date:
December 25, 1995
Filing Date:
June 08, 1992
Export Citation:
Assignee:
Sanki Industry Co., Ltd.
International Classes:
B01L1/04; E04B1/92; H05K9/00; (IPC1-7): E04B1/92
Attorney, Agent or Firm:
Furuya Fumio (1 person outside)
Next Patent: 磁気シールドパネルユニットの配管貫通部における磁気遮蔽構造