Title:
【発明の名称】感放射線性樹脂組成物
Document Type and Number:
Japanese Patent JP3063197
Kind Code:
B2
Inventors:
Katsumi Inomata
Toshiyuki Ohta
Kiji Yumoto
Takao Miura
Toshiyuki Ohta
Kiji Yumoto
Takao Miura
Application Number:
JP5839691A
Publication Date:
July 12, 2000
Filing Date:
February 28, 1991
Export Citation:
Assignee:
JSR Corporation
International Classes:
G03F7/004; C08K5/15; C08K5/1575; C08K5/22; C08K5/28; C08L101/00; G03F7/022; H01L21/027; H01L21/26; (IPC1-7): G03F7/022; G03F7/004; H01L21/027
Domestic Patent References:
| JP1309052A | ||||
| JP5763526A | ||||
| JP556397A | ||||
| JP2191248A | ||||
| JP5076156A |
Attorney, Agent or Firm:
Shuji Iwamiya